Title:
MEASUREMENT DEVICE AND MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2017/169732
Kind Code:
A1
Abstract:
The measurement device according to the present invention is provided with: a light source unit for projecting pulsed light or light periodically modulated in intensity to a measurement object, the light source unit being disposed with a gas layer or a vacuum layer interposed between the measurement object and the light source unit; a light receiving unit for receiving backscattered light backscattered by the measurement object from the light projected by the light source unit, the light receiving unit being disposed with the gas layer or the vacuum layer interposed between the measurement object and the light receiving unit; and a TOF measurement unit for measuring TOF information of the backscattered light received by the light receiving unit. A measurement device is thereby provided whereby the measurement object can be measured using TOF estimation without contact with the measurement object by the light source unit or the light receiving unit.
Inventors:
MURAKAMI MIYUKI (JP)
Application Number:
PCT/JP2017/010149
Publication Date:
October 05, 2017
Filing Date:
March 14, 2017
Export Citation:
Assignee:
OLYMPUS CORP (JP)
International Classes:
G01C3/06; G01N21/17; G01N21/27; G01N21/49
Foreign References:
| JPH10111238A | 1998-04-28 | |||
| JPH03501652A | 1991-04-11 | |||
| JP2013190350A | 2013-09-26 | |||
| JP2010210506A | 2010-09-24 | |||
| JP2004333344A | 2004-11-25 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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