Title:
MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/138061
Kind Code:
A1
Abstract:
A measurement device (100) comprising: a first optical system (1641) that causes terahertz waves (THz) generated by a generation unit (110) to be incident on a sample (10) at a first angle (θ１) and causes the terahertz waves reflected by the sample to be incident on a detection unit (130); a second optical system (1642) that causes terahertz waves generated by the generation unit to be incident on the sample at a second angle (θ２) and causes the terahertz waves reflected by the sample to be incident on the detection unit; and a switching unit (153) that switches the incidence destination for the terahertz waves generated by the generation unit between the first and second optical systems.
Inventors:
OKUDA YOSHIYUKI (JP)
Application Number:
PCT/JP2016/053632
Publication Date:
August 17, 2017
Filing Date:
February 08, 2016
Export Citation:
Assignee:
PIONEER CORP (JP)
International Classes:
G01N21/3581
Domestic Patent References:
| WO2010106589A1 | 2010-09-23 |
Foreign References:
| JP2014119448A | 2014-06-30 | |||
| JP2007309857A | 2007-11-29 | |||
| JP2012237657A | 2012-12-06 |
Attorney, Agent or Firm:
EGAMI, Tatsuo et al. (JP)
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