Title:
MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/220595
Kind Code:
A1
Abstract:
Provided is a measurement device capable of suppressing the influence of the ambient temperature on measurement results. This measurement device (10, 10-1, 10-2) comprises a probe part (14) that is provided with a probe (12) for measuring the surface of an object under measurement and is attached so as to be capable of oscillating around an oscillation center according to the shape of the surface of the object under measurement, a scale for measuring displacement resulting from the oscillation of the probe part, a scale head (26) for reading the scale marks of the scale, and an arm part (16) that the probe part and scale are attached to and is attached so as to be capable of oscillating around the oscillation center integrally with the probe part. The condition (α + γ) – 1/2α ≤ β ≤ (α + γ) + 1/2α is satisfied, where α, β, and γ are the thermal expansion coefficients of the probe part, arm part, and scale, respectively.
Inventors:
MORII HIDEKI (JP)
INOUE TAKUYA (JP)
INOUE TAKUYA (JP)
Application Number:
PCT/JP2021/006600
Publication Date:
November 04, 2021
Filing Date:
February 22, 2021
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD (JP)
International Classes:
G01B5/20; G01B5/28; G01B21/30
Foreign References:
| JP2004069510A | 2004-03-04 | |||
| JP2001021304A | 2001-01-26 | |||
| JP2012053033A | 2012-03-15 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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