Title:
MEASUREMENT INSTRUMENT FOR CHEMICAL/PHYSICAL PHENOMENA AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2019/131564
Kind Code:
A1
Abstract:
In the present invention, the components of a gas are suitably measured using a chemical/physical measuring instrument comprising a measurement unit array for chemical/physical phenomena that includes: a sensing unit that varies the potential well depth in accordance with the surface potential; a sensitivity film that covers the sensing unit; and a detection region that outputs electrical signals in accordance with the potential well depth of the sensing unit. A fixed potential section is disposed in proximity of the measurement unit array. This fixed potential section is, in a plan view, disposed in accordance with the arrangement rule of the measurement unit array, and the reference point of the array and the reference point of the fixed potential section coincide.
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Inventors:
SAWADA KAZUAKI (JP)
IWATA TATSUYA (JP)
SHINMYO NAOYA (JP)
IWATA TATSUYA (JP)
SHINMYO NAOYA (JP)
Application Number:
PCT/JP2018/047398
Publication Date:
July 04, 2019
Filing Date:
December 22, 2018
Export Citation:
Assignee:
NATIONAL UNIV CORPORATION TOYOHASHI UNIV OF TECHNOLOGY (JP)
International Classes:
G01N27/414; G01N27/00; G01N27/416
Domestic Patent References:
| WO2016035752A1 | 2016-03-10 |
Foreign References:
| JP2012207991A | 2012-10-25 | |||
| JPH03502149A | 1991-05-16 |
Attorney, Agent or Firm:
KONISHI, Tomimasa (JP)
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