Title:
MEASUREMENT METHOD, COMPUTER PROGRAM, AND MEASUREMENT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2019/082528
Kind Code:
A1
Abstract:
The present invention makes it possible to more appropriately measure the displacement or vibration of a measurement region. This measurement method is used in a measurement system that comprises an imaging device and an information processing device, wherein: the imaging device captures images before and after deformation of a measurement region to which a diagonal grid is affixed so that the long direction of a rectangular measurement region that is part of a sample and the long direction of the rectangular diagonal grid match; and the information processing device calculates the phase difference of the diagonal grid in the long direction from the captured images before and after deformation by moiré analysis and calculates the displacement or vibration before and after deformation of the measurement region in the short direction on the basis of the calculated phase difference in the long direction.
Inventors:
RI SHIEN (JP)
WANG QINGHUA (JP)
TSUDA HIROSHI (JP)
WANG QINGHUA (JP)
TSUDA HIROSHI (JP)
Application Number:
PCT/JP2018/033450
Publication Date:
May 02, 2019
Filing Date:
September 10, 2018
Export Citation:
Assignee:
AIST (JP)
International Classes:
G01B11/16
Domestic Patent References:
| WO2018061321A1 | 2018-04-05 |
Foreign References:
| JP5818218B2 | 2015-11-18 |
Other References:
CHEN XINXING ET AL.: "A digital sampling moire method for two-dimensional displacement", PROCEEDINGS OF SPIE, vol. 9435, 3 April 2015 (2015-04-03), pages 943523 - 943523-11, XP060052414, ISSN: 0277-786X, DOI: 10.1117/12.2084148
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
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