Title:
MEASUREMENT METHOD AND ENCODER DEVICE, AND EXPOSURE METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/161428
Kind Code:
A1
Abstract:
Provided is an encoder which measures a relative degree of movement between a first member and a second member, comprising: a diffraction grating which is disposed upon the first member; a PBS member which is disposed upon the second member and whereby measurement light is made to enter approximately perpendicularly to the diffraction grating; a reflection part which is disposed upon the second member and whereby diffracted light which is emitted from the diffraction grating by the measurement light is made to enter the diffraction grating, and whereby diffracted light which is emitted from the diffraction grating is made to enter the PBS member; and a photoelectric sensor which detects interference light between the diffracted light which enters the PBS member and a reference light. When measuring using the diffraction grating, a decline of signal intensity of interference light with respect to a height change of a grating pattern face may be suppressed.
Inventors:
LIU ZHIGIANG (JP)
Application Number:
PCT/JP2013/057309
Publication Date:
October 31, 2013
Filing Date:
March 14, 2013
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01D5/38
Domestic Patent References:
| WO2008029757A1 | 2008-03-13 |
Foreign References:
| JP2008070363A | 2008-03-27 | |||
| JP2012049284A | 2012-03-08 | |||
| JPS60190812A | 1985-09-28 |
Attorney, Agent or Firm:
OMORI SATOSHI (JP)
Omori 聡 (JP)
Omori 聡 (JP)
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