MEASURING APPARATUS AND MEASURING METHOD OF SURFACE OF OBJECT

Title:

MEASURING APPARATUS AND MEASURING METHOD OF SURFACE OF OBJECT

Document Type and Number:

WIPO Patent Application WO/2019/216624

Kind Code:

A1

Abstract:

A measuring apparatus of a surface of an object is disclosed. The measuring apparatus of a surface of an object comprises: a supporting part on which an object to be measured is placed; at least three probes for measuring a surface of the object to be measured; and a driving unit for driving any one of either the supporting part or the at least three probes relative to the other.

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Inventors:

CHO NAHM GYOO (KR)
KIM MINKYU (KR)
BAEK SANG-WOO (KR)

Application Number:

PCT/KR2019/005441

Publication Date:

November 14, 2019

Filing Date:

May 08, 2019

Export Citation:

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Assignee:

IUCF HYU ERICA CAMPUS (KR)

International Classes:

G01B21/30; G01B21/20; G01B21/32; G06F17/10

Foreign References:

JP2016183887A	2016-10-20
KR100756009B1	2007-09-06
JPH06147879A	1994-05-27
JP2007178296A	2007-07-12
JP2017037028A	2017-02-16

Attorney, Agent or Firm:

PARK, Sangyoul (KR)

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