Title:
MEASURING APPARATUS AND MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/117691
Kind Code:
A1
Abstract:
The measuring device of the present disclosure is provided with a support plate and an optical sensor. A target is positioned in the center part of the upper surface of the support plate, which is capable of being rotated about an axis of rotation that extends in the vertical direction from the center part. The optical sensor is situated above the support plate, and has a light-emitting element for illuminating the target with light, and a photoreceptor element for receiving reflected light reflected by the target.
Inventors:
YAMADA TOMOYA (JP)
MATSUDERA TAKU (JP)
MATSUDERA TAKU (JP)
Application Number:
PCT/JP2016/051882
Publication Date:
July 28, 2016
Filing Date:
January 22, 2016
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
G01B11/30; G01N21/47
Foreign References:
| JP2011197012A | 2011-10-06 | |||
| JP2002350283A | 2002-12-04 | |||
| JP2013253030A | 2013-12-19 | |||
| US20050112115A1 | 2005-05-26 | |||
| JPH0921755A | 1997-01-21 | |||
| JPH09304294A | 1997-11-28 |
Other References:
See also references of EP 3249351A4
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