Title:
MEASURING DEVICE, COMPONENT FOR MEASURING DEVICE, AND OPERATION PROCESSING DEVICE FOR MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/080544
Kind Code:
A1
Abstract:
The present invention addresses the problem of improving sensitivity of a measuring device. In order to solve the problem, provided is a measuring device that detects a value that is equivalent to the physical quantity of a measurement target by the amplitudes of two vibrators, the measuring device comprising: a real cantilever (1B) as one of the two vibrators; an actuator (22) that applies a force in a preset displacement direction to the cantilever (1B); a vibration displacement detection unit that includes a displacement meter (23) of the cantilever (1B); and an operation processing device that simulates a cantilever (1A) that is virtually bonded with the cantilever (1B) so as to be capable of coupling with the cantilever (1B) as the other one of the two vibrators and that executes coupled control processing for driving and controlling the actuator (22) on the basis of the cantilever (1A) and the vibration displacement of the cantilever (1B) detected by the vibration displacement detection unit.
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Inventors:
YABUNO HIROSHI (JP)
YAMAMOTO YASUYUKI (JP)
MATSUMOTO SOHEI (JP)
YAMAMOTO YASUYUKI (JP)
MATSUMOTO SOHEI (JP)
Application Number:
PCT/JP2019/041213
Publication Date:
April 23, 2020
Filing Date:
October 18, 2019
Export Citation:
Assignee:
UNIV TSUKUBA (JP)
AIST (JP)
AIST (JP)
International Classes:
G01N5/02
Foreign References:
| JP2016065817A | 2016-04-28 | |||
| US20180074018A1 | 2018-03-15 | |||
| JP2003083840A | 2003-03-19 |
Other References:
CAI, GUIBING ET AL.: "Net-overhang Coupled Microcantilevers for Sensitive Mass Detection", SENSORS 2013 IEEE, 4 November 2013 (2013-11-04), XP032532488, DOI: 10.1109/ICSENS.2013.6688214
Attorney, Agent or Firm:
TANAKA Hidetetsu et al. (JP)
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