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Patent Searching and Data


Title:
MEASURING DEVICE AND METHOD FOR SETTING OBSERVATION CONDITIONS
Document Type and Number:
WIPO Patent Application WO/2018/154800
Kind Code:
A1
Abstract:
A measuring device for irradiating charged particle beams and observing samples, wherein the measuring device is characterized by comprising a particle source for outputting charged particle beams, a lens for focusing the charged particle beams, a detector for detecting signals of emission electrons emitted from a sample onto which charged particle beams were irradiated, and a control device for controlling the output of the charged particle beams and the detection of the emission electron signals on the basis of observation conditions, and moreover characterized in that: the control device sets as observation conditions a first parameter for controlling the irradiation period of the charged particle beams, a second parameter for controlling the pulse width of pulse-form charged particle beams, and a third parameter for controlling the detection timing of emission electron signals within the irradiation time of the pulse-form charged particle beams; and the third parameter is determined on the basis of the difference in strength of individual signals of the plurality of emission electrons emitted from the irradiation position of the charged particle beams.

Inventors:
ARAKI, Ryoko (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
TSUNO, Natsuki (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
NAKAMURA, Yohei (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
SASAJIMA, Masahiro (24-14 Nishi-Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
NAKAMURA, Mitsuhiro (24-14 Nishi-Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
AGEMURA, Toshihide (24-14 Nishi-Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
Application Number:
JP2017/017993
Publication Date:
August 30, 2018
Filing Date:
May 12, 2017
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi-Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
International Classes:
H01J37/22; H01J37/28
Foreign References:
JP2012252913A2012-12-20
JPS62223960A1987-10-01
JP2007265931A2007-10-11
Attorney, Agent or Firm:
TOU-OU PATENT FIRM (Urban Toranomon Bldg, 16-4 Toranomon 1-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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