Title:
MEASURING DEVICE AND MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/042531
Kind Code:
A1
Abstract:
Disclosed is a measuring device that measures a sample by irradiating the sample with a charged particle beam, said measuring device being provided with a particle source, an electron lens, a detector, a stage, a sensor that measures environment, and a control device. The control device has a control module that includes: a height calculation module that calculates a predicted height value that indicates a predicted value of the height of the sample at a sample measuring position; and a correction value calculation module that calculates a correction value reflecting an environmental change, said correction value being calculated on the basis of the sample measuring position, and an environmental change quantity measured by the sensor. The control module corrects, on the basis of the correction value, the predicted height value, and sets, on the basis of a corrected predicted height value, a control value for controlling focus adjustment using the electron lens.
Inventors:
TAKAHASHI NORITSUGU (JP)
SAKAKIBARA MAKOTO (JP)
MORI WATARU (JP)
KAWANO HAJIME (JP)
SASAKI YUKO (JP)
SAKAKIBARA MAKOTO (JP)
MORI WATARU (JP)
KAWANO HAJIME (JP)
SASAKI YUKO (JP)
Application Number:
PCT/JP2016/075413
Publication Date:
March 08, 2018
Filing Date:
August 31, 2016
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/21; H01J37/10; H01J37/20; H01J37/244
Domestic Patent References:
| WO2009136441A1 | 2009-11-12 |
Attorney, Agent or Firm:
TOU-OU PATENT FIRM (JP)
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