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Title:
MEASURING DEVICE AND MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/186630
Kind Code:
A1
Abstract:
This measuring device (100) which measures the outer shape of a metal plate (10) including a magnetic body is provided with: a stage (1) on which the metal plate (10) is placed; a light source (2) that emits light toward the stage (1); an image acquisition unit for acquiring an image of the metal plate (10); a plurality of magnetic force generation units (4, 6) which generate magnetic force from the rear surface side of the stage (1); and a control unit (7) which controls the position of magnetic force generation.

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Inventors:
INUZUKA MASAHIRO
Application Number:
PCT/JP2018/012065
Publication Date:
October 03, 2019
Filing Date:
March 26, 2018
Export Citation:
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Assignee:
SHARP KK (JP)
International Classes:
H05B33/10; C23C14/04; G09F9/00; G09F9/30; H01L27/32; H01L51/50
Foreign References:
JP2016000840A2016-01-07
JP2016053192A2016-04-14
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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