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Patent Searching and Data


Title:
MEASURING PROBE FOR MEASURING THE THICKNESS OF THIN FILMS
Document Type and Number:
WIPO Patent Application WO/2014/174025
Kind Code:
A1
Abstract:
The invention relates to a measuring probe for measuring the thickness of thin films, comprising a housing (12) and at least one sensor element (14, 15), which is supported resiliently with respect to the housing (12) by means of at least one spring element (33, 37) and has a contacting spherical cap (31) pointing opposite the contacting direction and along the longitudinal axis (38) of the sensor element toward the measurement surface (25) of a measurement object (26), wherein a damping device (17) is provided on the housing (12), which damping device acts in the contacting direction (28) of the at least one sensor element (14, 15) before the sensor element (14, 15) contacts the measurement surface (25) of the measurement object (26) and damps the contacting motion of the at least one sensor element (14, 15) in the direction toward the measurement surface (25) of the measurement object (26).

Inventors:
VOLZ WERNER (DE)
Application Number:
PCT/EP2014/058367
Publication Date:
October 30, 2014
Filing Date:
April 24, 2014
Export Citation:
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Assignee:
HELMUT FISCHER GMBH INST FÜR ELEKTRONIK UND MESSTECHNIK (DE)
International Classes:
G01B7/06; G01D11/10
Foreign References:
DE19735433A11998-03-05
DE19649515A11998-06-04
US3975829A1976-08-24
Attorney, Agent or Firm:
MAMMEL UND MASER (DE)
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