Title:
MEASURING PROBE FOR MEASURING THE THICKNESS OF THIN LAYERS, AND METHOD FOR THE PRODUCTION OF A SENSOR ELEMENT FOR THE MEASURING PROBE
Document Type and Number:
WIPO Patent Application WO/2012/160132
Kind Code:
A1
Abstract:
The invention relates to a measuring probe for measuring the thickness of thin layers, comprising a housing (14), at least one sensor element (17) which is accommodated so as to be at least slightly movable along a longitudinal axis (16) within the housing (14) and which comprises at least one coil device (44) associated with the longitudinal axis (16), and a spherical positioning cap (21) which points in the direction of the outer face of the housing (14), is arranged along the longitudinal axis (16), and has a base (55) that includes a cylindrical core section (56) and a pole cap (58) arranged on a face of the core section (56). The coil device (44), which is formed of a disk-shaped or ring-shaped support (49) with at least one Archimedean coil arranged thereon, is associated with the spherical positioning cap (21). The base (55) is made of a ferritic material while the pole cap is made of hard metal.
Inventors:
FISCHER HELMUT (CH)
Application Number:
PCT/EP2012/059691
Publication Date:
November 29, 2012
Filing Date:
May 24, 2012
Export Citation:
Assignee:
HELMUT FISCHER GMBH INST FUER ELEKTRONIK UND MESSTECHNIK (DE)
FISCHER HELMUT (CH)
FISCHER HELMUT (CH)
International Classes:
G01N27/90; G01B7/06
Domestic Patent References:
| WO2010044670A2 | 2010-04-22 |
Foreign References:
| US3855561A | 1974-12-17 | |||
| US4829251A | 1989-05-09 | |||
| DE102005054593A1 | 2007-05-16 | |||
| DE69935610T2 | 2007-11-29 |
Attorney, Agent or Firm:
PATENTANWÄLTE MAMMEL UND MASER (DE)
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Claims: