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Title:
MEASURING SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/061945
Kind Code:
A1
Abstract:
A measuring system (5001) to be used on the production line of a micro device is independently provided from an exposure apparatus. The measuring system (5001) is provided with: a plurality of measuring apparatuses (1001-1003), which respectively measure substrates (for instance, substrates having been subjected to at least one process but before being coated with a sensitive agent); and a transfer system for receiving/delivering the substrates from/to the measuring apparatuses. The measuring apparatuses include: the first measuring apparatus (1001) that acquires, by being set to first conditions, the positional information of a plurality of marks formed on the substrates; and the second measuring apparatus (1002) that acquires, by being set to the first conditions, the positional information of marks formed on another substrate (for instance, another substrate included in the lot of the substrate, the positional information of which is to be acquired by means of the first measuring device set to the first conditions).

Inventors:
ICHINOSE GO (JP)
DOSHO TOMONORI (JP)
Application Number:
PCT/JP2017/033954
Publication Date:
April 05, 2018
Filing Date:
September 20, 2017
Export Citation:
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Assignee:
NIKON CORP (JP)
International Classes:
G03F9/00; G01B21/00; G03F7/20; H01L21/68
Domestic Patent References:
WO2007102484A12007-09-13
WO2007086316A12007-08-02
WO2004055803A12004-07-01
WO2004057590A12004-07-08
Foreign References:
JP2013153167A2013-08-08
JP2013175500A2013-09-05
JP2015535615A2015-12-14
JP2013239721A2013-11-28
JP2012099850A2012-05-24
JP2012227551A2012-11-15
US20020042664A12002-04-11
US20080013073A12008-01-17
US5448332A1995-09-05
US20070288121A12007-12-13
US20030025890A12003-02-06
US5532091A1996-07-02
US6590634B12003-07-08
US5969441A1999-10-19
US6208407B12001-03-27
EP1420298A22004-05-19
US20060231206A12006-10-19
US20050280791A12005-12-22
US6952253B22005-10-04
Other References:
See also references of EP 3521932A4
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
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