Title:
MECHANICAL ARM, EXPOSURE MACHINE FRONT UNIT AND TEMPERATURE CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2019/047244
Kind Code:
A1
Abstract:
A mechanical arm (10), an exposure machine front unit (1000) and temperature control method. The mechanical arm (10) is used with the exposure machine front unit (1000), the exposure machine front unit (1000) comprising a temperature control unit (200) and a conveying unit (100); the mechanical arm (10) is located within the conveying unit (100), and the mechanical arm (10) comprises: a main body (12) and a temperature sensor (14). The main body (12) may bear a glass substrate and convey the glass substrate that is located within the temperature control unit (200) to the exposure machine; the temperature sensor (14) is arranged on the main body (12) and is used for monitoring the temperature within the conveying unit (100). The mechanical arm (10) may stabilize the temperature of the glass substrate during the conveying process so as to effectively prevent temperature changes from affecting exposure precision.
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Inventors:
HUANG SHUNHONG (CN)
ZHU GUANGFEI (CN)
ZHU GUANGFEI (CN)
Application Number:
PCT/CN2017/101308
Publication Date:
March 14, 2019
Filing Date:
September 11, 2017
Export Citation:
Assignee:
SHENZHEN ROYOLE TECHNOLOGIES CO LTD (CN)
International Classes:
B25J19/00; G03F7/20
Foreign References:
| CN102257437A | 2011-11-23 | |||
| CN106078804A | 2016-11-09 | |||
| CN106003096A | 2016-10-12 | |||
| CN106885476A | 2017-06-23 | |||
| CN1656601A | 2005-08-17 | |||
| JP4020261B2 | 2007-12-12 |
Attorney, Agent or Firm:
TSINGYIHUA INTELLECTUAL PROPERTY LLC (CN)
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