Title:
MECHANICAL PROPERTY MEASUREMENT APPARATUS FOR THIN-FILM MATERIAL
Document Type and Number:
WIPO Patent Application WO/2020/183682
Kind Code:
A1
Abstract:
Provided is a mechanical property measurement apparatus that is for a thin-film material, and that can measure the mechanical properties of a low-strength, low-elastic, and extremely thin material. A mechanical property measurement apparatus 10 for a thin-film material includes: a pair of negative pressure clamps 20, 22 that suck and fix both ends of a test piece 12 by using negative pressure; a tensile load applying device 28 that applies a tensile load on the test piece 12 through one negative pressure clamp 22; and a load sensor 26 that has a crystal plate having a thin-plate shape provided to a load transmission path between the negative pressure clamp 22 and the tensile load applying device 28 and detects the magnitude of the tensile load to be applied to the crystal plate. By having such configuration, when the tensile load is applied to the test piece 12 from the tensile load applying device 28, since the tensile load is detected by the load sensor 26, it is possible to measure the mechanical properties of the test piece 12 which is a low-strength, low-elastic, and extremely thin material.
Inventors:
SAKUMA SHINYA (JP)
ARAI FUMIHITO (JP)
ARAI FUMIHITO (JP)
Application Number:
PCT/JP2019/010415
Publication Date:
September 17, 2020
Filing Date:
March 13, 2019
Export Citation:
Assignee:
NATIONAL UNIV CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM (JP)
International Classes:
G01N3/00; G01N3/08
Foreign References:
| JP2012159408A | 2012-08-23 | |||
| JP2002221473A | 2002-08-09 | |||
| JP2005331446A | 2005-12-02 | |||
| JPH09184794A | 1997-07-15 | |||
| CN2852102Y | 2006-12-27 |
Other References:
HASEGAWA, NORIAKI ET AL.: "Wide range force sensor probe using quartz crystal resonator for measurement of the mechanical properties of living samples in liquid environment", PROCEEDINGS OF JSME ANNUAL CONFERENCE ON ROBOTICS AND MECHATRONICS, 9 May 2017 (2017-05-09), pages 1 - 3
HASEGAWA, NORIAKI ET AL.: "Mechanical Feature Value Measurement of Ultrathin Films Using Crystal-Vibration-Type Load Sensor", PROCEEDINGS OF THE 35TH ANNUAL CONFERENCE OF THE ROBOTICS SOCIETY OF JAPAN, 11 September 2017 (2017-09-11), pages 1 - 2
SAKUMA, SHINYA ET AL.: "Submerged Tensile Properties Evaluation of Ultrathin Films", PROCEEDINGS OF CHEMINAS 37., 21 May 2018 (2018-05-21), pages 42
HASEGAWA, NORIAKI ET AL.: "Mechanical Feature Value Measurement of Ultrathin Films Using Crystal-Vibration-Type Load Sensor", PROCEEDINGS OF THE 35TH ANNUAL CONFERENCE OF THE ROBOTICS SOCIETY OF JAPAN, 11 September 2017 (2017-09-11), pages 1 - 2
SAKUMA, SHINYA ET AL.: "Submerged Tensile Properties Evaluation of Ultrathin Films", PROCEEDINGS OF CHEMINAS 37., 21 May 2018 (2018-05-21), pages 42
Attorney, Agent or Firm:
IKEDA Haruyuki et al. (JP)
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