Title:
MECHANICAL QUANTITY MEASUREMENT DEVICE AND PRESSURE SENSOR USING SAME
Document Type and Number:
WIPO Patent Application WO/2015/159662
Kind Code:
A1
Abstract:
Provided are a mechanical quantity measurement device having high accuracy, long-term reliability, and function safety and a pressure sensor using the same. A mechanical quantity measurement device according to the present invention is provided with a strain detection area configured from impurity diffusion resistor bodies formed on a semiconductor substrate surface. Impurity diffusion resistances composing a Wheatstone bridge are configured through the connection in series of a plurality of resistor bodies corresponding to the detection area. Each resistance is connected via a selection circuit for detection area selection and deselection. Two pairs of sensors having different detection directions such that the outputs thereof vary according to an applied mechanical quantity are connected so as to be combined in a staggered manner. Further, selection circuits are also provided between output nodes. A calculation circuit unit and control circuit unit are disposed in the periphery of the detection area and select an arbitrary selection circuit disposed within the detection area and take in detection circuit output. Control of the selection circuits disposed within the detection circuit and comparison with an expected value are used to detect resistance increase in the detection circuit and other failures.
Inventors:
MIYAJIMA KENTAROU (JP)
Application Number:
PCT/JP2015/059021
Publication Date:
October 22, 2015
Filing Date:
March 25, 2015
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01L9/00; G01R17/10; G01R31/02
Foreign References:
| JP2004191189A | 2004-07-08 | |||
| JPH07270206A | 1995-10-20 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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