Title:
MECHANICAL QUANTITY MEASUREMENT DEVICE AND PRESSURE SENSOR USING SAME
Document Type and Number:
WIPO Patent Application WO/2017/056671
Kind Code:
A1
Abstract:
Provided are a mechanical quantity measurement device having a higher signal-to-noise ratio and resolution than the prior art and a pressure sensor using the same. A mechanical quantity measurement device that is provided with a plurality of Wheatstone bridges on the main surface of a single semiconductor substrate 1 that are composed from impurity-diffused resistors and detect the difference between the strain amount occurring in the x-axis direction and the strain amount occurring in the y-axis direction, which intersect at right angles on the main surface of the semiconductor substrate 1, said mechanical quantity measurement device being characterized in that the impurity-diffused resistors composing the plurality of Wheatstone bridges are disposed evenly in an area to be measured.
Inventors:
MIYAJIMA KENTAROU (JP)
Application Number:
PCT/JP2016/072251
Publication Date:
April 06, 2017
Filing Date:
July 29, 2016
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01L1/18; G01L9/00; H01L29/84
Domestic Patent References:
| WO2015033669A1 | 2015-03-12 |
Other References:
See also references of EP 3358325A4
Attorney, Agent or Firm:
TODA Yuji (JP)
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