Title:
MEMBER FOR SEMICONDUCTOR PRODUCTION APPARATUSES, METHOD FOR PRODUCING SAME, AND MOLDING DIE FOR SAME
Document Type and Number:
WIPO Patent Application WO/2019/088203
Kind Code:
A1
Abstract:
This member for semiconductor production apparatuses is provided with: a circular ceramic disk which has a built-in electrode; and a ceramic shaft which supports the circular disk. The circular disk and the shaft are integrated with each other in such a manner that there is no joint interface.
Inventors:
NOBORI KAZUHIRO (JP)
KIMURA TAKUJI (JP)
KIMURA TAKUJI (JP)
Application Number:
PCT/JP2018/040588
Publication Date:
May 09, 2019
Filing Date:
October 31, 2018
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H01L21/683; B28B1/14; B28B7/00
Foreign References:
| JPH10242252A | 1998-09-11 | |||
| JP2010245564A | 2010-10-28 | |||
| JP2003142564A | 2003-05-16 |
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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