Title:
MEMBRANE AND METHOD FOR THE PRODUCTION THEREOF
Document Type and Number:
WIPO Patent Application WO2004036952
Kind Code:
A3
Abstract:
The invention relates to a method for producing a membrane (120) used for a component, for example for a microphone. The inventive method consists in deposing a counter electrode (104) on a substrate (100), said counter electrode (104) comprising a sacrificial layer arranged on a surface opposite to said substrate (100). The side of the sacrificial layer which is opposite to the counter electrode (104) is structured in such a way that a plurality of slots is formed thereon and one or several anti-adherent elements and one or several corrugation grooves are defined. Afterwards, a membraneous material is deposed on the structured side in such a way that the membrane (120) provided with one or several corrugation grooves (124) or with one or several anti-adherent elements is formed.
Inventors:
DEHE ALFONS (DE)
BARZEN STEFAN (DE)
FUELDNER MARC (DE)
BARZEN STEFAN (DE)
FUELDNER MARC (DE)
Application Number:
PCT/EP2003/011204
Publication Date:
January 20, 2005
Filing Date:
October 09, 2003
Export Citation:
Assignee:
INFINEON TECHNOLOGIES AG (DE)
DEHE ALFONS (DE)
BARZEN STEFAN (DE)
FUELDNER MARC (DE)
DEHE ALFONS (DE)
BARZEN STEFAN (DE)
FUELDNER MARC (DE)
International Classes:
B81B3/00; H04R19/00; H04R31/00; (IPC1-7): H04R19/00; H04R31/00
Foreign References:
| US5573679A | 1996-11-12 |
Other References:
ZOU Q ET AL: "DESIGN AND FABRICATION OF SILICON CONDENSER MICROPHONE USING CORRUGATED DIAPHRAGM TECHNIQUE", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 5, no. 3, 1 September 1996 (1996-09-01), pages 197 - 203, XP000636781, ISSN: 1057-7157
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