Title:
MEMBRANE PROBE CARD AND PROBE HEAD THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/092897
Kind Code:
A1
Abstract:
The present invention relates to a membrane probe card and a probe head thereof. The membrane probe card comprises a membrane probe head (3), the membrane probe head (3) comprising a support body (31), a membrane (32), probes (33), and an interconnection wire (34), wherein a recessed support structure (35) is provided between an operation surface (311) of the support body (31) and the membrane (32); the recessed support structure (35) comprises a recessed structure (351) and a supporting elastic layer (352); the recessed structure (351) comprises one or more recesses (3511), the recesses (3511) corresponding to the positions of the probes (33), and each recess (3511) being arranged eccentrically relative to the corresponding probe (33); and raised inserts (3521) of the supporting elastic layer (352) are inserted into the corresponding recesses (3511), such that the portions of the supporting elastic layer (352) on two sides of each probe (33) have a thickness difference.
Inventors:
ZHAO LIANGYU (CN)
YU HAICHAO (CN)
WANG AILIN (CN)
YU HAICHAO (CN)
WANG AILIN (CN)
Application Number:
PCT/CN2022/080715
Publication Date:
June 01, 2023
Filing Date:
March 14, 2022
Export Citation:
Assignee:
MAXONE SEMICONDUCTOR CO LTD (CN)
International Classes:
G01R31/26; G01R1/073
Foreign References:
| JP2005265750A | 2005-09-29 | |||
| CN1307358A | 2001-08-08 | |||
| CN102062794A | 2011-05-18 | |||
| US20150192609A1 | 2015-07-09 | |||
| JP2010098046A | 2010-04-30 |
Attorney, Agent or Firm:
SUZHOU CREATOR PATENT AND TRADEMARK AGENCY, LTD. (CN)
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