Title:
MEMS-BASED CAPACITIVE SENSOR FOR USE IN A SEISMIC ACQUISITION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2010/054216
Kind Code:
A3
Abstract:
An apparatus includes a seismic acquisition system that includes an accelerometer. The accelerometer includes a capacitive MEMS-based sensor, a controller and a charge amplifier. The sensor includes a proof mass; input terminals to receive a first signal; and an output terminal that is electrically connected to the proof mass to provide a second signal. The first signal, which is regulated by the controller, controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal. The charge amplifier provides a third signal, which is indicative of a position of the proof mass. The charge amplifier has an input terminal to continuously receive the second signal during a time in which the first signal controls the equilibrium restoring force and causes the sensor to provide the second signal.
Inventors:
PAULSON HANS (NO)
Application Number:
PCT/US2009/063579
Publication Date:
July 22, 2010
Filing Date:
November 06, 2009
Export Citation:
Assignee:
GECO TECHNOLOGY BV (NL)
SCHLUMBERGER CA LTD (CA)
WESTERNGECO LLC (US)
PAULSON HANS (NO)
SCHLUMBERGER CA LTD (CA)
WESTERNGECO LLC (US)
PAULSON HANS (NO)
International Classes:
G01V1/18; B81B7/00; G01P15/00; G01V1/16; G01V1/28
Foreign References:
| US7337671B2 | 2008-03-04 | |||
| US7293460B2 | 2007-11-13 | |||
| US6928875B2 | 2005-08-16 |
Other References:
See also references of EP 2353034A4
Attorney, Agent or Firm:
WELLS, Richard, V. (10001 Richmond AvenueHouston, Texas, US)
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