Title:
MEMS-BASED FLUID VALVE DEVICE
Document Type and Number:
WIPO Patent Application WO2004018908
Kind Code:
A3
Abstract:
A fluid valve device formed of MEMS devices includes a generally-planar semiconductor substrate (102) having one or more apertures (100/210) to provide passages for fluids, gases, or the like. Movable gate elements (104/214) alternately cover or expose such apertures to either block or open such passages. Actuators (110) in the form of miniature electromagnets (112/114) repel or attract the gate elements to open or close the passages. The fluid valve device may be used to control fluid (216), or in aspiration systems used to suction fluids.
Inventors:
SANFORD JAMES E (US)
Application Number:
PCT/US2003/026038
Publication Date:
December 09, 2004
Filing Date:
August 20, 2003
Export Citation:
Assignee:
SANFORD JAMES E (US)
International Classes:
F15C5/00; F16K99/00; G02B26/02; G03F7/20; (IPC1-7): F16D1/00; F16D31/06; F16D65/32
Foreign References:
| US6190034B1 | 2001-02-20 | |||
| US5449146A | 1995-09-12 | |||
| US6318402B1 | 2001-11-20 |
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