Title:
MEMS-BASED THREE-AXIS ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/004113
Kind Code:
A1
Abstract:
The present invention relates to a MEMS-based three-axis acceleration sensor and, more specifically, comprises: an x-axis sensor mass sensing an external acceleration inputted in the direction of a first axis parallel to a bottom wafer substrate; a y-axis sensor mass sensing an external acceleration inputted in the direction of a second axis parallel to the bottom wafer substrate and perpendicular to the first axis; and a z-axis sensor mass formed so as to encompass the x-axis sensor mass and the y-axis sensor mass and sensing an external acceleration inputted in the direction of a third axis perpendicular to the bottom wafer substrate, wherein space is saved and accelerations in the three axis directions are respectively measured by sensing the independent motion of each axis sensor mass.
Inventors:
SONG CI MOO (KR)
YOUN KEUN JUNG (KR)
LEE DO HYEON (KR)
KIM YONG KOOK (KR)
YOUN KEUN JUNG (KR)
LEE DO HYEON (KR)
KIM YONG KOOK (KR)
Application Number:
PCT/KR2017/003335
Publication Date:
January 04, 2018
Filing Date:
March 28, 2017
Export Citation:
Assignee:
SHIN SUNG C&T CO LTD (KR)
International Classes:
B81B7/02; G01P15/00; G01P15/18
Foreign References:
| US20080314147A1 | 2008-12-25 | |||
| KR20080073194A | 2008-08-08 | |||
| US20160084872A1 | 2016-03-24 | |||
| US20030010123A1 | 2003-01-16 | |||
| US20120000287A1 | 2012-01-05 |
Attorney, Agent or Firm:
KASAN IP & LAW FIRM (KR)
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