Title:
MEMS CONTROLLER AND MEMS CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2019/045021
Kind Code:
A1
Abstract:
[Problem] To provide a MEMS controller and a MEMS control method with which, in a MEMS provided with oscillating parts, which can oscillate around two axes, resonance of the oscillating parts is suppressed or prevented, unnecessary oscillation around one of the axes is suppressed or prevented, and rapid convergence is possible if resonance or unnecessary oscillating occurs. [Solution] Provided is a MEMS controller that supplies, to a MEMS comprising at least two support parts and two oscillating parts supported by the support parts, voltages for controlling oscillating angles generated by the oscillating parts, which have the two support parts as center axes; while each voltage transitions from an initial voltage V0 (V) to a set voltage V1 (V), which maintains the oscillating angle of an oscillating part at a set angle, the MEMS controller supplies a voltage V2 (V), which is a voltage value excluding both the initial voltage V0 (V) and the set voltage V1 (V). Further provided is a MEMS control method.
Inventors:
KANBARA DAISUKE (JP)
SATO MASAKAZU (JP)
ISHIKAWA MASANORI (JP)
YAMAUCHI KENYA (JP)
SATO MASAKAZU (JP)
ISHIKAWA MASANORI (JP)
YAMAUCHI KENYA (JP)
Application Number:
PCT/JP2018/032268
Publication Date:
March 07, 2019
Filing Date:
August 30, 2018
Export Citation:
Assignee:
ADAMANT NAMIKI PREC JEWEL CO LTD (JP)
International Classes:
B81B7/00; B81B3/00; G02B26/08
Foreign References:
| JP2007192902A | 2007-08-02 | |||
| JP2009244760A | 2009-10-22 | |||
| JP2010160387A | 2010-07-22 |
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