MEMS DEVICE, MEMS PACKAGE COMPRISING SAME AND USER TERMINAL

Title:

MEMS DEVICE, MEMS PACKAGE COMPRISING SAME AND USER TERMINAL

Document Type and Number:

WIPO Patent Application WO/2017/061640

Kind Code:

A1

Abstract:

Provided are a MEMS device, a MEMS package comprising same and a user terminal. The MEMS device comprises: a plurality of moving plates which are placed as mirrors; and a plurality of fixed plate groups which are placed as mirrors on the upper part or the lower part of the moving plates, wherein the moving plates and fixed plate groups are used for z axis sensing.

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Inventors:

MOON SANGHEE (KR)
SEO PYUNGBO (KR)
LEE JONGSUNG (KR)

Application Number:

PCT/KR2015/010533

Publication Date:

April 13, 2017

Filing Date:

October 06, 2015

Export Citation:

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Assignee:

STANDING EGG INC (KR)

International Classes:

B81B7/00; B81B7/02; B81C3/00; G01P15/00

Foreign References:

JP2008139282A	2008-06-19
JP2012521565A	2012-09-13
JP2011112388A	2011-06-09
KR100444235B1	2004-08-16
KR20130025366A	2013-03-11

Attorney, Agent or Firm:

YOO, Cheolhyun (KR)

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