Title:
MEMS DEVICE PREPARATION METHOD, MEMS PACKAGE AND USER TERMINAL
Document Type and Number:
WIPO Patent Application WO/2017/061636
Kind Code:
A1
Abstract:
Provided are a MEMS device preparation method, a MEMS package and a user terminal. The MEMS device preparation method comprises the steps of: providing a substrate comprising a silicon oxide layer and a silicon layer which is formed on the silicon oxide layer; forming a hard mask pattern on the silicon layer; reducing the thickness of an area requiring a step-shaped portion in the hard mask pattern; forming a MEMS structure pattern by means of primary etching the silicon layer by using the hard mask pattern; forming a step-shaped portion on the MEMS structure pattern by means of secondary etching the MEMS structure pattern by using the hard mask pattern; and completing a movable MEMS structure by means of removing a part of the silicon oxide layer.
Inventors:
SEO PYUNGBO (KR)
MOON SANGHEE (KR)
LEE JONGSUNG (KR)
MOON SANGHEE (KR)
LEE JONGSUNG (KR)
Application Number:
PCT/KR2015/010526
Publication Date:
April 13, 2017
Filing Date:
October 06, 2015
Export Citation:
Assignee:
STANDING EGG INC (KR)
International Classes:
B81C1/00; B81B7/02; G01P15/08; H01L21/027
Foreign References:
| JP2011091127A | 2011-05-06 | |||
| KR20060121068A | 2006-11-28 | |||
| JP2005118943A | 2005-05-12 | |||
| JP2013084996A | 2013-05-09 | |||
| JP2003218009A | 2003-07-31 |
Attorney, Agent or Firm:
YOO, Cheolhyun (KR)
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