Title:
MEMS ELEMENT AND VIBRATION POWER-GENERATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/070947
Kind Code:
A1
Abstract:
This MEMS element is provided with a base, a movable portion, an elastic portion, and a fixing portion. The elastic portion extends in a direction intersecting with a moving direction of the movable portion, and comprises: a central portion to which a force is applied from the movable portion; one end and another end which are fixed to a fixing portion body; and thin portions provided respectively between the central portion and the one end and between the central portion and the other end, the thin portions being thinner than the central portion, the one end, and the other end.
Inventors:
ASHIZAWA HISAYUKI (JP)
SHIMOMURA NORIKO (JP)
SHIMOMURA NORIKO (JP)
Application Number:
PCT/JP2020/038350
Publication Date:
April 15, 2021
Filing Date:
October 09, 2020
Export Citation:
Assignee:
SAGINOMIYA SEISAKUSHO INC (JP)
International Classes:
B81B3/00; H02N1/00
Foreign References:
| JP2002228680A | 2002-08-14 | |||
| JP2018146330A | 2018-09-20 | |||
| JP2019039804A | 2019-03-14 | |||
| US20170373611A1 | 2017-12-28 | |||
| JP2016209935A | 2016-12-15 | |||
| JP2018088780A | 2018-06-07 | |||
| JP2019187153A | 2019-10-24 |
Other References:
See also references of EP 4026797A4
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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