Title:
MEMS FILTER DEVICE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2006/011449
Kind Code:
A1
Abstract:
It is possible to provide a concatenated body of MEMS filters having a design flexibility and capable of ignoring the affect of the mass load. There is provided a structure in which the affect of the mass load is not reflected in the characteristic of MEMS filters by using a carbon nanotube (CNT) or the like as a concatenated body of nano size having a mass which is very small as compared to the micro size MEMS resonator.
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Inventors:
HASHIMURA AKINORI
Application Number:
PCT/JP2005/013582
Publication Date:
February 02, 2006
Filing Date:
July 25, 2005
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
HASHIMURA AKINORI
HASHIMURA AKINORI
International Classes:
H03H9/46; B81B3/00; H01L29/06; H03H3/007; H03H9/24
Foreign References:
JP2004193202A | 2004-07-08 | |||
JP2002134325A | 2002-05-10 | |||
US20020046953A1 | 2002-04-25 | |||
JP2004163373A | 2004-06-10 |
Other References:
DEMIRCI MU ET AL: "Mechanically corner-coupled square microresonator array for reduced series motional resistance.", THE 12TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS., 9 June 2003 (2003-06-09), pages 955 - 958, XP010647856
WILLIAMS PA ET AL: "Torsional Response and Stiffening of Individual Multiwalled Carbon Nanotubes.", PHYSICAL REVIEW LETTERS., vol. 89, no. 25, 16 December 2002 (2002-12-16), pages 1 - 4, XP002990550
WILLIAMS PA ET AL: "Torsional Response and Stiffening of Individual Multiwalled Carbon Nanotubes.", PHYSICAL REVIEW LETTERS., vol. 89, no. 25, 16 December 2002 (2002-12-16), pages 1 - 4, XP002990550
Attorney, Agent or Firm:
Takamatsu, Takeshi (7-13 Nishi-Shimbashi 1-chom, Minato-ku Tokyo 03, JP)
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