Title:
MEMS GAS SENSOR MOUNTED BODY
Document Type and Number:
WIPO Patent Application WO/2020/195673
Kind Code:
A1
Abstract:
[Problem] To provide a MEMS gas sensor mounted body that does not need a cap that protects a MEMS gas sensor chip and can be easily made thinner. [Solution] The present invention comprises: a MEMS gas sensor chip that has a base that has a cavity, an insulating film that is provided on the base so as to cover the cavity and has an opening part that communicates with the cavity, a gas-sensitive part that is provided on the insulating film in a region that is above the cavity, and a plurality of pads that are provided on the insulating film in a region that is not above the cavity and are connected to the gas-sensitive part; and a printed board that has a gas introduction channel and a plurality of connection terminals. The MEMS gas sensor chip is mounted on the printed board such that the cavity and the gas introduction channel overlap in plan view and the plurality of pads and the plurality of connection terminals are electrically connected.
Inventors:
KIMURA TEPPEI (JP)
SUZUKI HIROAKI (JP)
SUZUKI HIROAKI (JP)
Application Number:
PCT/JP2020/009383
Publication Date:
October 01, 2020
Filing Date:
March 05, 2020
Export Citation:
Assignee:
NISSHA CO LTD (JP)
International Classes:
G01N27/04; G01N27/12
Domestic Patent References:
| WO2009145373A1 | 2009-12-03 |
Foreign References:
| KR20180085186A | 2018-07-26 | |||
| JP2012098233A | 2012-05-24 | |||
| JP2012078089A | 2012-04-19 | |||
| JP2009216543A | 2009-09-24 | |||
| JP2016047646A | 2016-04-07 |
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