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Title:
MEMS GRAVIMETER
Document Type and Number:
WIPO Patent Application WO/2018/232779
Kind Code:
A1
Abstract:
Disclosed is a MEMS gravimeter, comprising: a vibrator unit (1, 15, 16, 17), a shift sensing structure (2), a shift detection circuit (4), a chamber (7) and a horizontal adjusting base (10). The vibrator unit (1, 15, 16, 17) is provided inside the chamber (7), and the vibration unit (1, 15, 16, 17) comprises a negative stiffness spring (12), a positive stiffness spring (14), an experimental weight (13) and an outer frame (11), wherein the experimental weight (13) is connected to the outer frame (11) via the negative stiffness spring (12) and the positive stiffness spring (14), the positive stiffness spring (14) and the negative stiffness spring (12) are symmetrically arranged relative to the experimental weight (13), and the outer frame (11) is fixedly coupled to the chamber (7). The shift sensing structure (2) is provided on a surface of the experimental weight (13), and the shift detection circuit (4) is used for detecting a shift signal of the shift sensing structure (2). The vibrator unit (1, 15, 16, 17) reduces intrinsic frequency by matching the positive and negative stiffness springs (12, 14). A change in gravitational acceleration is measured by measuring a shift in the experimental weight (13).The MEMS gravimeter has high stability, is low in volume, is light in weight, can effectively reduce production costs, and can effectively reduce difficulties in research and development of signal detection units and stabilise platform.

Inventors:
TU LIANGCHENG (CN)
TANG SHIHAO (CN)
LIU JINQUAN (CN)
FAN JI (CN)
Application Number:
CN2017/091111
Publication Date:
December 27, 2018
Filing Date:
June 30, 2017
Export Citation:
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Assignee:
UNIV HUAZHONG SCIENCE TECH (CN)
International Classes:
G01V7/02
Domestic Patent References:
WO2004015430A12004-02-19
Foreign References:
CN103999348A2014-08-20
CN101382564A2009-03-11
CN101844739A2010-09-29
CN101654216A2010-02-24
CN102023234A2011-04-20
CN102375075A2012-03-14
CN103994760A2014-08-20
Attorney, Agent or Firm:
HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY PATENT AGENCY CENTER (CN)
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