MEMS GYROSCOPE HAVING 2-DEGREE-OF-FREEDOM SENSING MODE

Title:

MEMS GYROSCOPE HAVING 2-DEGREE-OF-FREEDOM SENSING MODE

Document Type and Number:

WIPO Patent Application WO/2016/182303

Kind Code:

A1

Abstract:

Provided is an MEMS gyroscope, which is resistant against external environmental changes such as a microfabrication process error, a vacuum package process error and a temperature change. The MEMS gyroscope comprises: a frame arranged parallel to a bottom wafer substrate; a sensor mass body excited at one degree of freedom in an excitation mode, and of which the displacement is sensed at two degrees of freedom by Coriolis force in a sensing mode when an external angular velocity is inputted into the frame; and at least two sensing electrodes for sensing the displacement of the sensor mass body, the displacement being sensed at the two degrees of freedom, wherein the sensor mass body comprises an inner mass body and an outer mass body encompassing the inner mass body, the outer mass body and the frame are connected by a first support spring, and the outer mass body and the inner mass body are connected by a second support spring.

Inventors:

SONG CI MOO (KR)
YOUN KEUN JUNG (KR)
KANG JEONG SIK (KR)
KIM YONG KOOK (KR)
HAN SEUNG HO (KR)
SONG HYUN JU (KR)

Application Number:

PCT/KR2016/004855

Publication Date:

November 17, 2016

Filing Date:

May 10, 2016

Export Citation:

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Assignee:

SHIN SUNG C&T CO LTD (KR)

International Classes:

G01C19/5712; B81B7/02

Foreign References:

KR20130084950A	2013-07-26
KR20030049313A	2003-06-25
JP2014160070A	2014-09-04
JP2012047537A	2012-03-08
JP2001021360A	2001-01-26

Other References: