Title:
MEMS GYROSCOPE HAVING IMPROVED PERFORMANCE
Document Type and Number:
WIPO Patent Application WO/2017/030226
Kind Code:
A1
Abstract:
According to the present invention, disclosed is a MEMS gyroscope that comprises: a plurality of drive masses (110) disposed parallel to each other on a substrate (140), wherein the plurality of drive masses (110) are paired to oscillate in opposite directions and are spaced apart from each other with a predetermined interval therebetween to have point symmetry with respect to the Z-axis; resilient coupling parts (130), each of which is disposed between lateral sides of the two drive masses (110) so as to be parallel to the same and is formed in a hook shape to guide the driving direction of each drive mass (110) while being connected to the two adjacent drive masses (110) at opposite ends thereof; a GND line (150) extending along the outer periphery of the substrate (140); and a GND pad (151) disposed within an empty space in the middle of each resilient coupling part (130) and electrically connected with the GND line (150) to absorb an electrical component applied from a signal line (141) disposed close, or opposite, to the resilient coupling part 130 to shield the electrical component such that the electrical component is prevented from being applied to the resilient coupling part (130).
Inventors:
MOON SANG HEE (KR)
SEO PYUNG BO (KR)
LEE JONG SUNG (KR)
SEO PYUNG BO (KR)
LEE JONG SUNG (KR)
Application Number:
PCT/KR2015/008768
Publication Date:
February 23, 2017
Filing Date:
August 21, 2015
Export Citation:
Assignee:
STANDING EGG INC (KR)
International Classes:
G01C19/5719; B81B7/02; G01C19/5733
Foreign References:
| US20110154898A1 | 2011-06-30 | |||
| JP2004191094A | 2004-07-08 | |||
| JP2010117293A | 2010-05-27 | |||
| KR100436367B1 | 2004-06-19 | |||
| US20150059473A1 | 2015-03-05 |
Attorney, Agent or Firm:
KIM, Young Dae (KR)
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