MEMS GYROSCOPE

WIPO Patent Application WO/2021/134685

A1

A MEMS gyroscope, comprising a harmonic oscillator (6) and a plurality of external electrodes (3), wherein the external electrodes (3) are distributed in a circular array at the periphery of the harmonic oscillator (6); the harmonic oscillator (6) is an axially symmetrical disk-shaped net-like structure; the harmonic oscillator (6) comprises an anchor point structure (1) located at the center of the harmonic oscillator (6) and a spiral structure; the spiral structure is fixedly connected to the anchor point structure (1); and in the spiral structure, a plurality of spiral units are interwoven into a net shape in a circular array according to the anchor point structure (1). The gyroscope is based on the advantages of a disk-shaped gyroscope, wherein the spiral structure is composed of spiral units in a circular array from a starting point, and has a built-in anchor point, which simplifies spiral line segments and other means so as to reduce the process difficulty and facilitate micro-nano processing. At the same time, the width h of the resonator deformation may be reduced, thereby increasing QTED. The gyroscope uses the symmetrical feature of the spiral structure, and implements a gyro driving mode and a detection mode that has large quality factors. The mode of vibration is degenerate and conforms to the Coriolis effect.

MA ZHAO (CN)
ZHAN ZHAN (CN)
LI YANG (CN)
ZHANG RUI (CN)
LIU YUWEI (SG)
TAN QIUYU (SG)
LAI KAH KEEN (SG)

PCT/CN2019/130923

July 08, 2021

December 31, 2019

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AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
AAC TECH NANJING CO LTD (CN)

G01C19/56; G01C19/16; G01C19/42

CN104990546A	2015-10-21
CN109596116A	2019-04-09
US20190049247A1	2019-02-14
CN104807452A	2015-07-29
CN109839104A	2019-06-04

GUANGZHOU YUEXIU JILY PATENT & TRADEMARK LAW OFFICE (CN)

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