Title:
MEMS LOUDSPEAKER
Document Type and Number:
WIPO Patent Application WO/2023/245806
Kind Code:
A1
Abstract:
Provided in the present utility model is an MEMS loudspeaker, comprising a substrate defining a cavity and provided with openings at two ends, a cantilever extending from one end of the substrate to the cavity and at least partially suspended above the cavity, a piezoelectric actuator fixed to the side of the cantilever distant from the cavity, and a polymer layer provided on the side of the piezoelectric actuator distant from the cavity. The cantilever comprises a first section fixed to the substrate, a second section extending from the first section to the cavity and suspended above the cavity, and a third section extending from the second section to a direction distant from the first section. The piezoelectric actuator is only fixed to the third section, and one end of the third section distant from the second section is suspended. The polymer layer completely covers the cantilever, the piezoelectric actuator and the cavity and is attached to the cantilever beam and the piezoelectric actuator. The polymer layer, the cantilever and the piezoelectric actuator jointly form a piezoelectric composite diaphragm structure for sound production by vibration. Compared with the related art, medium and high frequency bands of the MEMS loudspeaker according to the utility model have a high sound pressure level.
Inventors:
DAN QIANG (CN)
SHEN YU (CN)
ZHOU YIWEI (CN)
LI YANG (CN)
SHEN YU (CN)
ZHOU YIWEI (CN)
LI YANG (CN)
Application Number:
PCT/CN2022/108314
Publication Date:
December 28, 2023
Filing Date:
July 27, 2022
Export Citation:
Assignee:
AAC KAITAI TECH WUHAN CO LTD (CN)
International Classes:
H04R19/02; B81B7/02; H04R7/02; H04R17/00
Domestic Patent References:
| WO2021106266A1 | 2021-06-03 |
Foreign References:
| CN217985406U | 2022-12-06 | |||
| CN114339552A | 2022-04-12 | |||
| CN215581695U | 2022-01-18 | |||
| CN112219409A | 2021-01-12 | |||
| CN112752209A | 2021-05-04 | |||
| CN107564505A | 2018-01-09 | |||
| FR2660146A1 | 1991-09-27 | |||
| TWI752600B | 2022-01-11 | |||
| CN102415108A | 2012-04-11 | |||
| US10999684B1 | 2021-05-04 |
Attorney, Agent or Firm:
SHENZHEN JUNXINCHENG INTELLECTUAL PROPERTY FIRM (GENERAL PARTNERSHIP) (CN)
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