MEMS MICROPHONE CHIP TRIMMING METHOD, APPARATUS, MANUFACTURING METHOD AND MICROPHONE

Title:

MEMS MICROPHONE CHIP TRIMMING METHOD, APPARATUS, MANUFACTURING METHOD AND MICROPHONE

Document Type and Number:

WIPO Patent Application WO/2017/075766

Kind Code:

A1

Abstract:

The present invention discloses a MEMS microphone chip trimming method, apparatus, manufacturing method and microphone. The method for trimming MEMS microphone chips comprises: detecting a pull-in voltage distribution of MEMS microphone chips on a wafer; providing a mask based on the pull-in voltage distribution; and trimming the MEMS microphone chips on the wafer by using the mask.

Inventors:

ZOU QUANBO (CN)
WANG ZHE (CN)
LOKE YAN (CN)

Application Number:

PCT/CN2015/093733

Publication Date:

May 11, 2017

Filing Date:

November 03, 2015

Export Citation:

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Assignee:

GOERTEK INC (CN)

International Classes:

H04R29/00

Foreign References:

US20130136267A1	2013-05-30
US20130154054A1	2013-06-20
US20100277229A1	2010-11-04
US20020088109A1	2002-07-11
EP1764343A2	2007-03-21
US20110013787A1	2011-01-20

Attorney, Agent or Firm:

BEYOND TALENT PATENT AGENT FIRM (CN)

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