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Patent Searching and Data


Title:
MEMS MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2019/100432
Kind Code:
A1
Abstract:
Disclosed is a MEMS microphone, comprising a substrate, a first diaphragm and a second diaphragm, wherein a sealed chamber is formed between the first diaphragm and the second diaphragm; a back electrode unit is located in the sealed chamber and forms a capacitor structure together with the first diaphragm and the second diaphragm, and the back electrode unit is provided with multiple through holes penetrating two sides thereof; and a gas with a coefficient of viscosity less than air is filled in the sealed chamber. In the MEMS microphone of the present invention, by filling a gas with a coefficient of viscosity less than air in the sealed chamber, the acoustic resistance when the two diaphragms move relative to the back electrode can be greatly reduced, thereby reducing the noise of the microphone. Moreover, a gas with a low coefficient of viscosity is used for the filling, such that the pressure in the sealed chamber can be made consistent with the pressure of the external environment, avoiding the problem of diaphragm deflection due to pressure difference, and ensuring the performance of the microphone.

Inventors:
ZOU, Quanbo (No. 268 Dongfang Road, Hi-Tech Industry DistrictWeifang, Shandong 1, 261031, CN)
WANG, Zhe (No. 268 Dongfang Road, Hi-Tech Industry DistrictWeifang, Shandong 1, 261031, CN)
DONG, Yongwei (No. 268 Dongfang Road, Hi-Tech Industry DistrictWeifang, Shandong 1, 261031, CN)
Application Number:
CN2017/113952
Publication Date:
May 31, 2019
Filing Date:
November 30, 2017
Export Citation:
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Assignee:
GOERTEK INC. (No. 268 Dongfang Road, Hi-Tech Industry DistrictWeifang, Shandong 1, 261031, CN)
International Classes:
H04R1/28; H04R7/02
Foreign References:
CN104254046A2014-12-31
CN103561374A2014-02-05
CN104902400A2015-09-09
CN103402160A2013-11-20
US20080267431A12008-10-30
Other References:
See also references of EP 3518558A4
None
Attorney, Agent or Firm:
BEYOND TALENT PATENT AGENT FIRM (Room 1202, Kuntai Building#10 Chaoyangmenwai Str., Chaoyang District, Beijing 0, 100020, CN)
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