Title:
MEMS PRESSURE SENSING ELEMENT
Document Type and Number:
WIPO Patent Application WO/2017/000500
Kind Code:
A1
Abstract:
Provided is a MEMS pressure sensing element, comprising: a substrate (1) provided with a recess; a pressure-sensitive film (100) arranged at the top of the substrate (1), the pressure-sensitive film (100) sealing the opening of the recess so as to form a sealed cavity (700); a pressure-sensitive bar (200) that is suspended inside the sealed cavity (700) and parallel to the pressure-sensitive film (100), and on which are arranged voltage-dependent resistors (300); the center of the pressure-sensitive bar (200) is fixedly connected to the center of the pressure-sensitive film (100), and the outer periphery is fixedly connected to the bottom wall of the recess so that the pressure-sensitive film (100) causes the pressure-sensitive bar (200) to bend and deform under the influence of the pressure of the external environment. Also provided is a method for manufacturing a MEMS pressure sensing element. When pressure is applied to the pressure-sensitive film (100), the pressure-sensitive film (100) moves the pressure-sensitive bar (200), causing the pressure-sensitive bar (200) to bend and in turn causing the resistance of the voltage-dependent resistors (300) on the pressure-sensitive bar (200) to change; thus not only is the pressure sensing function performed, but the electrical components of the pressure sensing element are also shielded from electromagnetic interference caused by the external environment.
Inventors:
ZHENG GUOGUANG (CN)
Application Number:
PCT/CN2015/096918
Publication Date:
January 05, 2017
Filing Date:
December 10, 2015
Export Citation:
Assignee:
GOERTEK INC (CN)
International Classes:
G01L9/02
Foreign References:
| CN1796954A | 2006-07-05 | |||
| CN104897333A | 2015-09-09 | |||
| CN204758194U | 2015-11-11 | |||
| CN103335753A | 2013-10-02 | |||
| CN103344374A | 2013-10-09 | |||
| US7290453B2 | 2007-11-06 | |||
| US20100251826A1 | 2010-10-07 |
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