Title:
MEMS PROBE CARD AND METHOD OF MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2010/027145
Kind Code:
A1
Abstract:
The present invention relates to a MEMS probe card and a method of manufacturing same; the MEMS probe card comprises a substrate furnished with via holes whereinto a via hole filler conductor or resistor is charged, a resistance film that is formed on said via hole and substrate, an insulation film that is formed on said resistance film and substrate, and an electrode that is formed on the substrate so as to surround said resistance film and insulation film. By using the above-described MEMS probe card and method of manufacturing same, precise resistance values may be obtained, and responses may be made to power changes in test equipment, such as for semiconductor ICs.
Inventors:
KIM SANG HEE (KR)
LEE SANG HYUN (KR)
LEE JAE SEOK (KR)
WOO CHUN SIK (KR)
LEE JAE IN (KR)
LEE SANG HYUN (KR)
LEE JAE SEOK (KR)
WOO CHUN SIK (KR)
LEE JAE IN (KR)
Application Number:
PCT/KR2009/003306
Publication Date:
March 11, 2010
Filing Date:
June 19, 2009
Export Citation:
Assignee:
TOP ENG CO LTD (KR)
KIM SANG HEE (KR)
LEE SANG HYUN (KR)
LEE JAE SEOK (KR)
WOO CHUN SIK (KR)
LEE JAE IN (KR)
KIM SANG HEE (KR)
LEE SANG HYUN (KR)
LEE JAE SEOK (KR)
WOO CHUN SIK (KR)
LEE JAE IN (KR)
International Classes:
H01L21/66; B81B7/02
Foreign References:
| KR20000034924A | 2000-06-26 | |||
| KR20020087144A | 2002-11-22 | |||
| KR20030040431A | 2003-05-22 | |||
| KR20060099859A | 2006-09-20 |
Attorney, Agent or Firm:
HONESTY AND PATENT IP LAW FIRM (KR)
특허법인 정직과 특허 (KR)
특허법인 정직과 특허 (KR)
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