Title:
MEMS RESONATOR, SENSOR HAVING THE SAME AND MANUFACTURING METHOD FOR MEMS RESONATOR
Document Type and Number:
WIPO Patent Application WO/2012/138006
Kind Code:
A1
Abstract:
A microelectromechanical system (MEMS) resonator, a sensor having the same and a method for manufacturing the MEMS resonator are provided. The MEMS resonator includes a base substrate of the MEMS resonator, the base substrate having a recess portion recessed into one surface thereof, an oscillator mounted at the base substrate and at least partially overlapping the recess portion to be vibrated using an empty space of the recess portion, and a wire connected to the oscillator and the base substrate, respectively, to control a natural frequency of the MEMS resonator by supporting at least part of the oscillator. Accordingly, the natural frequency of the resonator can be easily controlled.
Inventors:
LIM GEUNBAE (KR)
AN TAECHANG (KR)
KIM JINYOUNG (KR)
SUNG JUNGWOO (KR)
LEE SANGWOO (KR)
AN TAECHANG (KR)
KIM JINYOUNG (KR)
SUNG JUNGWOO (KR)
LEE SANGWOO (KR)
Application Number:
PCT/KR2011/003333
Publication Date:
October 11, 2012
Filing Date:
May 04, 2011
Export Citation:
Assignee:
AGENCY DEFENSE DEV (KR)
LIM GEUNBAE (KR)
AN TAECHANG (KR)
KIM JINYOUNG (KR)
SUNG JUNGWOO (KR)
LEE SANGWOO (KR)
LIM GEUNBAE (KR)
AN TAECHANG (KR)
KIM JINYOUNG (KR)
SUNG JUNGWOO (KR)
LEE SANGWOO (KR)
International Classes:
H03H9/24; B81B7/02
Foreign References:
| KR20100096665A | 2010-09-02 | |||
| US20080165403A1 | 2008-07-10 | |||
| KR20030008057A | 2003-01-24 | |||
| JP2007058105A | 2007-03-08 |
Attorney, Agent or Firm:
PARK, Jang-Won (Shinyoung Wacoal Bldg.49-4 Nonhyun-dong, Gangnam-gu, Seoul 135-814, KR)
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Claims:
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