Title:
MEMS RESONATOR
Document Type and Number:
WIPO Patent Application WO/2012/114655
Kind Code:
A1
Abstract:
Provided is an MEMS resonator with a high Q factor by suppressing a high-frequency signal loss caused by a barrier in a thin film laminated part. The MEMS resonator is configured to reduce a resistance loss of AC current by applying AC current concurrently with DC current when a junction interface(barrier) such as a pn junction is present in an AC current input and output system of an oscillator (1) and electrodes (2 and 3). DC bias circuits (22, 23, and 24) are provided at an input electrode side and/or at an output electrode side to constantly apply DC current to the junction interface.
Inventors:
NAKAMURA KUNIHIKO
Application Number:
PCT/JP2012/000616
Publication Date:
August 30, 2012
Filing Date:
January 31, 2012
Export Citation:
Assignee:
PANASONIC CORP (JP)
NAKAMURA KUNIHIKO
NAKAMURA KUNIHIKO
International Classes:
B81B3/00; H03H9/24
Foreign References:
| JP2005341536A | 2005-12-08 | |||
| JP2009094690A | 2009-04-30 | |||
| JP2006033813A | 2006-02-02 | |||
| JP2009190150A | 2009-08-27 |
Attorney, Agent or Firm:
SAMEJIMA, Mutsumi et al. (JP)
Mutsumi Sameshima (JP)
Mutsumi Sameshima (JP)
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Claims:
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