Title:
MEMS SENSOR
Document Type and Number:
WIPO Patent Application WO/2010/032820
Kind Code:
A1
Abstract:
Provided is an MEMS sensor wherein especially a structure for bonding each supporting conductive section of a movable electrode section and a fixed electrode section, which are supported on a first substrate side, with a lead layer embedded in an insulating layer on the side of a second substrate which faces the first substrate with a space therebetween is improved. The MEMS sensor has a first substrate (1), a second substrate (2), and a functional layer, which is arranged between the substrates and has the movable electrode section, the fixed electrode section and the supporting conductive section. On the surface of the second substrate (2), a second insulating layer (30), a lead layer (35) and a connecting electrode section (32) which is electrically connected to the lead layer and is individually connected to each supporting conductive section are arranged. On the surface of the second insulating layer (30), a recessed section (37) which penetrates to reach even the surface of the lead layer is formed. The connecting electrode section (32) has a recessed region (32a) conforming to the shape of the recessed section (37), and a connecting region (32b) which extends long on the surface of the second insulating layer (30) from one end section in the recessed region. The supporting conductive section (17) and a connecting region (32b) of the connecting electrode section (32) are bonded to each other.
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Inventors:
TAKAHASHI TORU (JP)
GOCHO HIDEKI (JP)
KOBAYASHI KIYOSHI (JP)
GOCHO HIDEKI (JP)
KOBAYASHI KIYOSHI (JP)
Application Number:
PCT/JP2009/066354
Publication Date:
March 25, 2010
Filing Date:
September 18, 2009
Export Citation:
Assignee:
ALPS ELECTRIC CO LTD (JP)
TAKAHASHI TORU (JP)
GOCHO HIDEKI (JP)
KOBAYASHI KIYOSHI (JP)
TAKAHASHI TORU (JP)
GOCHO HIDEKI (JP)
KOBAYASHI KIYOSHI (JP)
International Classes:
H01L29/84; G01P15/08; G01P15/125
Foreign References:
| JP2003329704A | 2003-11-19 | |||
| JP2007000986A | 2007-01-11 | |||
| JP2002076269A | 2002-03-15 | |||
| JP2005236159A | 2005-09-02 |
Other References:
See also references of EP 2346083A4
Attorney, Agent or Firm:
NOZAKI, Teruo et al. (JP)
Teruo Nozaki (JP)
Teruo Nozaki (JP)
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