MEMS SENSOR

WIPO Patent Application WO/2010/032822

A1

Provided is a MEMS sensor in which molten metal can be properly prevented from flowing out to a movable area. A first connecting metal layer (41) is formed on the surface of a support conduction portion (12), and a second connecting metal layer (31) is formed on the surface of a wiring substrate (2) that faces the support conduction portion (12).  The first connecting metal layer (41) and the second connecting metal layer (31) are joined to form a metal joint layer (51).  A groove (metal outflow preventing portion) (53) is formed so as to surround the metal joint layer (51) on the surface of the support conduction portion (12).  Thus, even if molten metal flows out when the first connecting metal layer (41) and the second connecting metal layer (31) are joined by being heated under pressure, the molten metal is dammed by the groove (53) and properly prevented from flowing out to a movable area.

KOBAYASHI KIYOSHI (JP)
SATO KIYOSHI (JP)
UTO YOSHITAKA (JP)
TAKAHASHI KAZUYOSHI (JP)
TAKAHASHI TORU (JP)
SUZUKI JUN (JP)

PCT/JP2009/066356

March 25, 2010

September 18, 2009

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ALPS ELECTRIC CO LTD (JP)
KOBAYASHI KIYOSHI (JP)
SATO KIYOSHI (JP)
UTO YOSHITAKA (JP)
TAKAHASHI KAZUYOSHI (JP)
TAKAHASHI TORU (JP)
SUZUKI JUN (JP)

B81B3/00; B81B7/00; B81C3/00; G01P15/125; H01L29/84

WO2007078472A1

2007-07-12

US7276789B1	2007-10-02
US20080067652A1	2008-03-20
JP2006525133A	2006-11-09
JP2005514221A	2005-05-19
JPH1167820A	1999-03-09

NOZAKI, Teruo et al. (JP)
Teruo Nozaki (JP)

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