Title:
MEMS SENSOR
Document Type and Number:
WIPO Patent Application WO/2011/016348
Kind Code:
A1
Abstract:
Provided is an MEMS sensor wherein, particularly, variations in the heights of spaces established between movable sections and a wiring board can be made smaller than in the case of prior art. The aforementioned MEMS sensor comprises a functional layer comprising a sensor unit; a wiring board which is placed facing the functional layer and is equipped with a conductive path for the sensor units; first metal layers that are provided on those surfaces of the sensor units which face the aforementioned wiring board; and second metal layers that are provided on that surface of the aforementioned wiring board which faces the aforementioned sensor units. The aforementioned first metal layers and the aforementioned second metal layers are joined together. Furthermore, spaces are formed between the movable section of the sensor unit and the aforementioned wiring board. Between the wiring board (22) and the portion of the functional layer (21) excluding the movable section, there is formed a stopper (43) which is a third metal layer (39) and an abutting section (34) brought into contact with each other, the aforementioned third metal layer (39) being formed of the same film as the aforementioned first metal layer which is a film on that surface of the functional layer which faces the aforementioned wiring board, and the abutting section (34) being provided on that surface of the wiring board (22) which faces the aforementioned sensor unit.
Inventors:
UTO YOSHITAKA (JP)
KOBAYASHI KIYOSHI (JP)
KOBAYASHI TOSHIHIRO (JP)
TAKAHASHI TORU (JP)
SUZUKI JUN (JP)
KIKUIRI KATSUYA (JP)
KOBAYASHI KIYOSHI (JP)
KOBAYASHI TOSHIHIRO (JP)
TAKAHASHI TORU (JP)
SUZUKI JUN (JP)
KIKUIRI KATSUYA (JP)
Application Number:
PCT/JP2010/062425
Publication Date:
February 10, 2011
Filing Date:
July 23, 2010
Export Citation:
Assignee:
ALPS ELECTRIC CO LTD (JP)
UTO YOSHITAKA (JP)
KOBAYASHI KIYOSHI (JP)
KOBAYASHI TOSHIHIRO (JP)
TAKAHASHI TORU (JP)
SUZUKI JUN (JP)
KIKUIRI KATSUYA (JP)
UTO YOSHITAKA (JP)
KOBAYASHI KIYOSHI (JP)
KOBAYASHI TOSHIHIRO (JP)
TAKAHASHI TORU (JP)
SUZUKI JUN (JP)
KIKUIRI KATSUYA (JP)
International Classes:
G01P15/08; G01P15/125; H01L29/84
Foreign References:
| JP2008008672A | 2008-01-17 | |||
| JP2004311951A | 2004-11-04 | |||
| JP2009047650A | 2009-03-05 | |||
| JPH11230985A | 1999-08-27 | |||
| JPH1167820A | 1999-03-09 | |||
| JP2001227902A | 2001-08-24 |
Attorney, Agent or Firm:
NOZAKI, Teruo et al. (JP)
Teruo Nozaki (JP)
Teruo Nozaki (JP)
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