Title:
MEMS SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/168013
Kind Code:
A1
Abstract:
This MEMS sensor is provided with: a plurality of pressure detection units having a plurality of first electrodes 11 and a plurality of second electrodes 12 which respectively face each other with cavity portions 13 therebetween; and a common wiring unit 10 for electrically connecting the plurality of first electrodes 11 and the plurality of second electrodes to each other. Furthermore, the common wiring unit 10 is provided with: a first common wiring 14 and a second common wiring unit 15; and an anti-corrosive wire 16 which is connected to at least one among the first common wiring 14 and the second common wiring unit 15 and higher in corrosion resistance than the first common wiring 14 and the second common wiring 15. Herein, the pressure is measured by detecting the change in capacity of each of the plurality of cavity portions 13.
Inventors:
SAKUMA NORIYUKI (JP)
ONOSE YASUO (JP)
ONOSE YASUO (JP)
Application Number:
PCT/JP2017/032771
Publication Date:
September 20, 2018
Filing Date:
September 12, 2017
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01L9/00; B81B3/00; G01L19/06; H01L29/84
Foreign References:
| JPH06109568A | 1994-04-19 | |||
| JP2008034816A | 2008-02-14 | |||
| JP2007067398A | 2007-03-15 | |||
| JP2006138802A | 2006-06-01 | |||
| JPH06201500A | 1994-07-19 | |||
| JP2016121972A | 2016-07-07 | |||
| JPH11201848A | 1999-07-30 | |||
| JP2016011889A | 2016-01-21 | |||
| US5672551A | 1997-09-30 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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