MEMS SOLENOID TRANSFORMER AND MANUFACTURING METHOD THEREFOR

WIPO Patent Application WO/2020/087973

A1

The embodiments of the present application provide an MEMS solenoid transformer, comprising: a silicon substrate, a soft magnet core, a first solenoid and a second solenoid; the soft magnet core is wrapped inside the silicon substrate, the silicon substrate is provided with a first helical channel and a second helical channel, and two opposite sides of the soft magnet core respectively pass through the center of the first helical channel and the center of the second helical channel, and the first solenoid and the second solenoid are respectively provided in the first helical channel and the second helical channel. Providing the soft magnet core, the first solenoid and the second solenoid of the transformer inside the silicon substrate fully utilizes the thickness of the silicon substrate, obtaining a larger winding cross-sectional area of the transformer, and a higher magnetic flux, so that the inductance value of the transformer is higher; moreover, the silicon substrate is able to protect the soft magnet core, the first solenoid and the second solenoid, improving the strength of the transformer, and providing a good resistance to shock.

XU TIANTONG (CN)
TAO ZHI (CN)
LI HAIWANG (CN)
WU HANXIAO (CN)

PCT/CN2019/095066

May 07, 2020

July 08, 2019

Click for automatic bibliography generation  

UNIV BEIHANG (CN)

H01F27/245; H01F17/00

CN101553890A	2009-10-07
CN109390144A	2019-02-26
CN109599249A	2019-04-09
US4777465A	1988-10-11
JP2016051765A	2016-04-11

CN-KNOWHOW INTELLECTUAL PROPERTY AGENT LIMITED (CN)

View/Download PDF      PDF Help

Previous Patent: MEMS SOLENOID INDUCTOR AND MANUFACTURING METHOD THEREFOR

Next Patent: MODEL GENERATION METHOD AND DEVICE