Title:
MEMS SPRUNG CANTILEVER TUNABLE CAPACITORS AND METHODS
Document Type and Number:
WIPO Patent Application WO/2011/088362
Kind Code:
A3
Abstract:
The present subject matter relates to MEMS tunable capacitors and methods for operating such capacitors. The tunable capacitor can feature a primary stationary actuator electrode on a substrate, a secondary stationary actuator electrode on the substrate, a stationary RF signal capacitor plate electrode on the substrate, a sprung cantilever disposed over the substrate, a beam anchor connecting a first end of the sprung cantilever to the substrate, and one or more elastic springs or other biasing members connecting a second end of the sprung cantilever to the substrate, the second end being located distally from the first end. The spring cantilever can be movable between an OFF state defined by the potential difference between the stationary and moveable actuator electrodes being zero, and an ON state defined by a non-zero potential difference between the stationary and moveable actuator electrodes.
Inventors:
DEREUS DANA (US)
Application Number:
PCT/US2011/021358
Publication Date:
November 17, 2011
Filing Date:
January 14, 2011
Export Citation:
Assignee:
WISPRY INC (US)
DEREUS DANA (US)
DEREUS DANA (US)
International Classes:
H01G5/16; B81B3/00
Foreign References:
| US6906905B1 | 2005-06-14 | |||
| US20040036132A1 | 2004-02-26 | |||
| US20060291134A1 | 2006-12-28 |
Other References:
See also references of EP 2524383A4
Attorney, Agent or Firm:
WILSON, Jeffrey, L. (Wilson Taylor & Hunt, P.A.,Suite 1200, University Tower,3100 Tower Boulevar, Durham NC, US)
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