Title:
MEMS SWITCH AND COMMUNICATION DEVICE USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2011/033729
Kind Code:
A1
Abstract:
Disclosed is an MEMS switch that, in order for the contact resistance of a point of contact that transmits signals to be maintained at a low level, in an ON mode maintains sufficient contact force for the point of contact to have low contact resistance, even after contact. Specifically disclosed is an MEMS switch (100) that is provided with a first electrode (101), a second electrode (104) that faces the electrode (101) and is formed separated therefrom, a third electrode (1021), and a fourth electrode (1022), and that forms an electric point of contact between the electrode (101) and the electrode (104) by means of an electrostatic force between the electrode (101), and the electrode (1021) and the electrode (1022); wherein a projection that forms a point of contact between the electrode (101) and the electrode (1021) and/or the electrode (1022) is disposed on the electrode (101), a gap is formed between the electrode (101) and the electrode (1021) and/or the electrode (1022) when the aforementioned electric point of contact has been formed, and the input of a control signal to the electrode (1021) and the input of a control signal to the electrode (1022) are performed mutually independent of one another.
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Inventors:
NAITO, Yasuyuki (())
内藤 康幸 (())
ROTTENBERG, Xavier (Avenue Adolphe Lacomble 18, Schaarbeek, B-1030, BE)
ロッテンバーグ グザビエ (B-1030 スハールベーク、アヴニュ・アドルフ・ラコンブレ１８番 Schaarbeek, B-1030, BE)
内藤 康幸 (())
ROTTENBERG, Xavier (Avenue Adolphe Lacomble 18, Schaarbeek, B-1030, BE)
ロッテンバーグ グザビエ (B-1030 スハールベーク、アヴニュ・アドルフ・ラコンブレ１８番 Schaarbeek, B-1030, BE)
Application Number:
JP2010/005269
Publication Date:
March 24, 2011
Filing Date:
August 26, 2010
Export Citation:
Assignee:
PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
IMEC (Kapeldreef 75, Leuven, B-3001, BE)
アイメック (B-3001 ルーヴァン、カペルドリーフ７５番 Leuven, B-3001, BE)
NAITO, Yasuyuki (())
内藤 康幸 (())
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
IMEC (Kapeldreef 75, Leuven, B-3001, BE)
アイメック (B-3001 ルーヴァン、カペルドリーフ７５番 Leuven, B-3001, BE)
NAITO, Yasuyuki (())
内藤 康幸 (())
International Classes:
H01H59/00; B81B3/00
Attorney, Agent or Firm:
TANAKA, Mitsuo et al. (AOYAMA & PARTNERS, IMP Building 3-7, Shiromi 1-chome, Chuo-ku, Osaka-sh, Osaka 01, 〒5400001, JP)
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