Title:
MEMS SWITCH AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2012/011703
Kind Code:
A2
Abstract:
According to the MEMS switch and the method for manufacturing same of the present invention, the MEMS switch includes a substrate, a first terminal formed on the substrate, a second terminal formed on the substrate and being spaced a predetermined interval from the first terminal, a conductive support formed on the second terminal, a conductive driving beam connected to the support in a cantilever form and extending parallel to the substrate to allow one end thereof to be disposed above the first terminal and to contact the first terminal when same is bent by an externally applied impact. Accordingly, a micro-sized switch may be manufactured and stable operation of the switch is possible.
Inventors:
CHOI, Jeong-Duck (101-406 Sungwon APT, 650 Daerim 3-dong, Yeongdeungpo-gu, Seoul 150-812, 150-812, KR)
최정덕 (서울 영등포구 대림3동 650 성원아파트 101동 406호, 150-812 Seoul, 150-812, KR)
YUK, Hyun-Mi (2 Imgwang-Geudeaka APT, 590 Majeong-ri, Gongdo-eup, Anseong-si, Gyeonggi-do 456-822, 456-822, KR)
육현미 (경기도 안성시 공도읍 마정리 590 임광그대가, 456-822 Gyeonggi-do, 456-822, KR)
최정덕 (서울 영등포구 대림3동 650 성원아파트 101동 406호, 150-812 Seoul, 150-812, KR)
YUK, Hyun-Mi (2 Imgwang-Geudeaka APT, 590 Majeong-ri, Gongdo-eup, Anseong-si, Gyeonggi-do 456-822, 456-822, KR)
육현미 (경기도 안성시 공도읍 마정리 590 임광그대가, 456-822 Gyeonggi-do, 456-822, KR)
Application Number:
KR2011/005260
Publication Date:
January 26, 2012
Filing Date:
July 18, 2011
Export Citation:
Assignee:
KOMICO LTD. (79 Sinmosan-dong, Anseong-si, Gyeonggi-do 456-390, 456-390, KR)
주식회사 코미코 (경기도 안성시 신모산동 79, 456-390 Gyeonggi-do, 456-390, KR)
CHOI, Jeong-Duck (101-406 Sungwon APT, 650 Daerim 3-dong, Yeongdeungpo-gu, Seoul 150-812, 150-812, KR)
최정덕 (서울 영등포구 대림3동 650 성원아파트 101동 406호, 150-812 Seoul, 150-812, KR)
YUK, Hyun-Mi (2 Imgwang-Geudeaka APT, 590 Majeong-ri, Gongdo-eup, Anseong-si, Gyeonggi-do 456-822, 456-822, KR)
주식회사 코미코 (경기도 안성시 신모산동 79, 456-390 Gyeonggi-do, 456-390, KR)
CHOI, Jeong-Duck (101-406 Sungwon APT, 650 Daerim 3-dong, Yeongdeungpo-gu, Seoul 150-812, 150-812, KR)
최정덕 (서울 영등포구 대림3동 650 성원아파트 101동 406호, 150-812 Seoul, 150-812, KR)
YUK, Hyun-Mi (2 Imgwang-Geudeaka APT, 590 Majeong-ri, Gongdo-eup, Anseong-si, Gyeonggi-do 456-822, 456-822, KR)
International Classes:
H01H59/00; B81B3/00
Attorney, Agent or Firm:
PARK, Young-Woo (5F. Seil Building, #727-13 Yeoksam-dong Gangnam-gu, Seoul 135-921, 135-921, KR)
Claims:
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